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Design of high-average-power clean EUV light source based on...

ui.adsabs.harvard.edu

Important design factors are evaluated for a high average power, clean EUV light source by laser produced plasma. The basic requirements are high average...

Laser-produced-plasma light source for EUV lithography - NASA/ADS

ui.adsabs.harvard.edu

Yousuke; Someya, Hiroshi; Hoshino, Hideo; Nakano, Masaki; Komori, Hiroshi; Takabayashi, Yuichi ...

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