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Tatjana Budischewski
Micromachining and Microfabrication Process Technology: Andreas Ostendorf, Klaus Koerber, Thorsten Temme, Bob Bann, Paul Apte, Heinz Haberzettl, Tatjana Budischewski, …
Heinz Haberzettl
Micromachining and Microfabrication Process Technology VI …: Click the paper title to view an abstract or to order an individual paper. … Thorsten Temme; …
Ilaria Gelmi
Ilaria Gelmi et al., "Stiction-free Release Etch with Anhydrous HF/Water Vapor Processes", Micromachining and Microfabrication Process technology …
Oliver Krampitz
Micromachining and Microfabrication Process Technology VI (Proceedings Volume) … Author(s): Oliver Krampitz; Michael Wycisk; Volker Biefeld; Josef Binder …
Heleen Esch
Micromachining and Microfabrication Process Technology. Micromachining and ... Holger Loewe, Wolfgang Ehrfeld, Joerg Diebel, [1997] MEMS Technology II ...
Cheng-Tang Lee
Cheng-Tang; Lee, Chengkuo Proc. SPIE Vol. 4174, p. 142-153, Micromachining and Microfabrication Process Technology VI, Jean-Michel Karam; John Yasaitis; ...
Daniel Okerlund
Micromachining and Microfabrication Process Technology XV …: Successful MEMS and MOEMS products depend on the development of novel and cost- effective manufacturing …